| 摘要 |
PURPOSE:To provide an excellent highly-repetitive pulse laser electrode, high in efficiency capable of producing a high output laser beam. CONSTITUTION:A plurality of pin-shaped preionization electrodes 11 connected electrically are provided on the rear side of a porous main electrode 9 having a plurality of openings 10. Ultraviolet rays generated between the edge of the openings 10 of the porous main electrode 9 and the top of the pin-shaped pre- ionization electrodes 11 diffuse from the openings 10 of the porous main electrode 9 to a main discharge region. Sine the space between the two opposite main electrodes 1 and 9 can be uniformly preionized over a wide range, glow discharge can be kept in a stable condition even under a highly-repetitive operation. |
