| 摘要 |
PURPOSE:To make it possible to obtain a bimorph vibrator superior in sensitivity and environmental characteristic, by applying an intermediate electrode material onto one face of a ceramic sheet and by applying an electrode material onto both faces and sintering it after this ceramic sheat is superposed onto the other ceramic sheet and pressure is applied to them. CONSTITUTION:Slurry consisting of ceramic powder, an organic binder, and an organic solvent is formed into two sheets and is solidified by drying, thereby producing two ceramic sheets 1' and 1'. Next, electrode material 4 to be an intermediate electrode is applied to one face of one sheet 1', and this sheet is superposed onto the other sheet 1', and pressure is applied to them. Next, electrode material 5 to be an electrode is applied to the upper face and the lower face of them. Next, sintering of sheets 1' and printing of electrodes 4 and 5 are performed simultaneously in a high-temperature oven, thus obtaining a piezo-electric element. At this time, polarization is performed according to the necessity of a parallel bimorph and a series bimorph to produce a bimorph vibrator. As a result, sensitivity, the environmental characteristic, and the productive characteristic can be improved. |
