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发明名称
REFLECTION OPTICAL MICROSCOPE WITH OBLIQUE ILLUMINATION
摘要
申请公布号
JPH05113408(A)
申请公布日期
1993.05.07
申请号
JP19910304127
申请日期
1991.10.22
申请人
SONY CORP
发明人
SUGANO YUKIYASU
分类号
G01B11/24;G01N21/84;G01N21/88;G01N21/956;G02B21/06;H01L21/66
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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