DRY ETCHING METHOD,申请号JP19910301282-传众专利搜索

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发明名称	DRY ETCHING METHOD
摘要
申请公布号	JPH05114591(A)	申请公布日期	1993.05.07
申请号	JP19910301282	申请日期	1991.10.22
申请人	SONY CORP	发明人	KADOMURA SHINGO
分类号	H01L21/302;H01L21/3065;H01L21/318;H01L21/768	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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