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发明名称
VERFAHREN UND EINRICHTUNG ZUM AUSRICHTEN VON SILICIUMPLAETTCHEN.
摘要
申请公布号
DE3874892(T2)
申请公布日期
1993.05.06
申请号
DE19883874892T
申请日期
1988.05.23
申请人
HINE DESIGN INC., PALO ALTO, CALIF., US
发明人
HINE, L., DEREK, PORTOLA VALLEY, CA 94025, US
分类号
B65G1/07;B65G47/14;B65G47/90;B65G49/07;H01L21/68;(IPC1-7):B65G47/14
主分类号
B65G1/07
代理机构
代理人
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地址
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