| 摘要 |
PURPOSE:To enable forming of fine patterns on an industrial scale by using an aq. soln. contg. the hydrofluoride of amine and an oxidizing agent as the etching liquid for aluminum. CONSTITUTION:The aq. soln. contg. the hydrofluoride of the aliphat. primary amine, secondary amine or ternary amine expressed by formula I (R1, R2, R3; H or alkyl group and at least one of the alkyl groups; the total of the carbon atoms of the three is <=12) and hydrogen peroxide as the oxidizing agent is used as the etching liquid for aluminum. The Al is first oxidized by the oxidizing agent to Al oxide, which is dissolved by the amine-hydrofluoride and, therefore, the trouble by the formation of a local battery is not received and the generation of gaseous hydrogen is obviated. The troubles, such as thinning of lines by undercuts and generation of a disconnection by the roughening of the lines, are eliminated and the fine patterns of <=1mm pitch are produced stably on the industrial scale.
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