| 摘要 |
PURPOSE:To provide an inspection device capable of recognizing defects with high accuracy and being easily controlled with a simple optical system and easily detecting unevenness defects of a large area even with a size in an order of millimeters. CONSTITUTION:An inspection device for small unevenness of planar objects comprises a laser light source 2, an optical fiber 6 of a core diameter (a), a convex lens 7 having a focal distance (f) of more than 100a, a cylindrical lens 8 for causing light to impinge on the surface of a planar subject for inspection, a screen 4 on which light reflected from the surface of the subject for inspection is projected, a CCD camera 5 for taking screen images, and an image processing portion 9. The convex lens 7 is disposed at a place separate by more than the focal distance from the end of the optical fiber and the cylindrical lens 8 forms light emitted from the convex lens 7 into rough slit light and causes the rough slit light to impinge on the surface of the planar subject for inspection at an angle of incidence phi from the diagonal direction, and light reflected at the surface in accordance with the surface configuration is projected onto the screen and the image processing portion 9 recognizes defective parts from image data. |
