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发明名称
DIFFUSION FURNACE
摘要
申请公布号
JPH05102054(A)
申请公布日期
1993.04.23
申请号
JP19910292354
申请日期
1991.10.11
申请人
SONY CORP
发明人
YANAGAWA SHUSAKU
分类号
C30B31/06;H01L21/22
主分类号
C30B31/06
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