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发明名称
PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE SUBSTRATE
摘要
申请公布号
EP0413547(B1)
申请公布日期
1993.04.21
申请号
EP19900308908
申请日期
1990.08.14
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED
发明人
ITO, TATSUO;NAKAZATO, YASUAKI
分类号
H01L21/304;H01L21/02;H01L21/20;H01L21/306;H01L21/762;H01L27/12
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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