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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0595020(A)
申请公布日期
1993.04.16
申请号
JP19910255075
申请日期
1991.10.02
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
KINOSHITA SHIYOUJI
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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