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发明名称
METHOD AND APPARATUS FOR CLEANING GALLIUM ARSENIDE WAFER
摘要
申请公布号
JPH0594977(A)
申请公布日期
1993.04.16
申请号
JP19910103118
申请日期
1991.04.08
申请人
EBARA CORP
发明人
YOSHIOKA TAKESHI;NISHIMURA TATSUYA
分类号
H01L21/304;B82B1/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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