| 摘要 |
PURPOSE:To provide a laser beam machine which can move the objective lens and a corrective lens rapidly and smooth at the same time. CONSTITUTION:A machining optical system which machines the front surface of a sample 7 by irradiating the laser beam ejected from a laser beam oscillator 1 to an opening means 3 and forming the image on the front surface of the sample and an observing optical system which observes the part to be machined of the sample front surface with a light of different wave length from the optical laser as an illuminating light are provided, an objective lens 6 corrected at infinity against the laser light or the illuminating light, and a correcting lens 12 which is corrected at infinity by combining the objective lens 6 against the different light which is the objective light corrected at infinity to the objective lens 6 are provided, a lens supporting mechanism 10 that the correcting lens 12 and the objective lens 6 are kept as a body by keeping the positional relation of the corrective lens and the objective lens 6 constant, and a lens moving mechanism 11 for correcting the pint which moves this supporting mechanism 10 are provided. |
