POSITIONING DEVICE FOR WAFER

摘要

PURPOSE:To provide a positioning device for wafer which can improve throughput by reducing the number of resetting a rotary reference position of a wafer holder and improve yield by contraction of a recess of the holder in the device for positioning the wafer at a predetermined position on a stage by using an orientation flat part. CONSTITUTION:A first reference member 10, a second reference member 11 and pressing means 12, 13 are provided integrally with a wafer holder 2, integrally rotated when the holder 2 is rotated by the operations of rotating means 4-9 thereby to eliminate necessity of returning the rotation of the holder 2 to a reference position when the wafer is replaced and to narrow the width of a recess 2c by the amount corresponding to the rotary stroke of the holder 2 so as to be convenient for flattening the wafer.