| 摘要 |
PURPOSE:To provide a multilayer glass ceramic substrate which has a high- density fine wiring, can be speeded up, and has an improved mechanical strength and its manufacturing method. CONSTITUTION:A glass ceramic layer of a multilayer glass ceramic substrate which contains a conductor at an inner layer is constituted of a total of 100wt.% of 12-59.6wt.% alumina, 10-30wt.% mullite, 18-69.6wt.% borosilicate glass, and 1-50wt.% anorthite crystal. Then, a mixed powder with a total of 100wt.% which consists of 10-50wt.% alumina, 10-50wt.% mullite, and 40-70wt.% borosilicate calcium glass is used as a raw material for manufacturing or an average particle of 0.5-3mum alumina, 1-10mum mullite, 1-5mum borosilicate glass, and 1-10mum anorthite is used. |
