发明名称 THIN FILM FIELD EFFECT TRANSISTOR
摘要 <p>This invention relates to the structure of a field effect transistor, which is suitable for liquid crystal display of active matrix scheme and there is disclosed a new structure for the field effect transistor, in which at least one of the source region (3) and the drain region (4) is of multi-layered structure, in which high impurity concentration portions (31, 33, 35; 41, 43, 45) and low impurity concentration portions (32, 34; 42, 44) are alternately superposed on each other.</p>
申请公布号 EP0249204(B1) 申请公布日期 1993.04.07
申请号 EP19870108356 申请日期 1987.06.10
申请人 HITACHI, LTD. 发明人 KONISHI, NOBUTAKE;MIYATA, KENJI;HOSOKAWA, YOSHIKAZU;SUZUKI, TAKAYA;MIMURA AKIO
分类号 H01L27/12;G02F1/1368;H01L29/08;H01L29/78;H01L29/786 主分类号 H01L27/12
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