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发明名称
INTEGRATED CIRCUIT INSPECTING DEVICE
摘要
申请公布号
JPH0580123(A)
申请公布日期
1993.04.02
申请号
JP19910241577
申请日期
1991.09.20
申请人
SHARP CORP
发明人
NAGAHIRO MASAYUKI
分类号
G01R31/26;G01R31/28;H03M1/10
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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