| 摘要 |
A profile measurement device (18) having a probe (16) scans the surface of a sample (12), acquiring topographical information which enables a computer (20) to build up a picture of the surface profile. A Raman spectrometer comprising a microscope objective (32), Raman analyser (24) and a photodetector (26) in the form of a charge-coupled device provides spectrographic information such as the composition of or strain in the sample surface from place to place. This information is correlated in the computer (20) with the profile information, to build up a more comprehensive picture. The profile measurement may make use of a stylus which scans in contact with the surface of the sample (12), or it may make use of a scanning tip microscopy such as atomic force microscopy or scanning tunnelling microscopy. Optical determination of the surface profile is also described. |
