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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0578838(A)
申请公布日期
1993.03.30
申请号
JP19910268596
申请日期
1991.09.20
申请人
NIPPON STEEL CORP
发明人
UCHIYAMA TOMOYUKI
分类号
C23C14/38;C23C14/44;H01L21/203;H01L21/285
主分类号
C23C14/38
代理机构
代理人
主权项
地址
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