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发明名称
ANISOTROPIC ETCHING METHOD
摘要
申请公布号
JPH0574744(A)
申请公布日期
1993.03.26
申请号
JP19910236629
申请日期
1991.09.17
申请人
NIPPON STEEL CORP
发明人
KOBAYASHI SATOSHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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