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发明名称
PLASMA PROCESS DEVICE
摘要
申请公布号
JPH0567499(A)
申请公布日期
1993.03.19
申请号
JP19910076520
申请日期
1991.04.09
申请人
NIPPON STEEL CORP;AFUTEI:KK
发明人
OSHIMA TAKAHARU;HIDAKA RYOTA;HIROTSU NOBUYOSHI;OKUBO NAOTAKE
分类号
C23C14/36;C23C14/35;H05H1/46
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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