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发明名称
MANUFACTURE OF SOI SUBSTRATE
摘要
申请公布号
JPH0562952(A)
申请公布日期
1993.03.12
申请号
JP19910247069
申请日期
1991.08.31
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
OTA YUTAKA;NAKANO MASATAKE;OKI YOSHI;KATAYAMA MASAYASU
分类号
G01B11/06;H01L21/02;H01L21/304;H01L21/66;H01L27/12
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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