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发明名称
METHOD AND DEVICE FOR WAFER TEMPERATURE MEASUREMENT
摘要
申请公布号
JPH0563054(A)
申请公布日期
1993.03.12
申请号
JP19910244636
申请日期
1991.08.29
申请人
NIPPON STEEL CORP
发明人
TAKANO KAZUO
分类号
G01K1/14;G01K7/02;H01L21/66
主分类号
G01K1/14
代理机构
代理人
主权项
地址
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