发明名称 FOCUSING DEVICE FOR SCANNING ELECTRON MICROSCOPE AND THE LIKE
摘要 PURPOSE:To improve greatly the S-N ratio by analyzing frequency component of detecting signals from a detecting mechanism, and signal treating in an optimal frequency region to focus accrurately. CONSTITUTION:It is necessary to select and change the differential frequency region of a differentiation mechanism depending on the kind of samples to analyze detecting signals, accordingly a differentiating mechanism 7 to differentiate detecting signals depending on the frequency component with time and a frequency detecting device 8 connected to the detecting mechanism 6 through a switch SW to analyze the frequency component of detecting signals and to select and change the differential frequency region of the differentiating mechanism 7 depending on the analyzed results are connected to the detecting mechanism 6 in parallel to each other. The differentiating mechanism 7 is constituted with four differentiators 7a-7d, differential frequency regions of them are different from each other, and with switchs 7a'-7d' connected to each input terminal. Each differentiator is provided with the gain characteristics in which the cutoff frequency is successively shifted to higher frequency.
申请公布号 JPS5641662(A) 申请公布日期 1981.04.18
申请号 JP19790116924 申请日期 1979.09.12
申请人 AKASHI SEISAKUSHO KK 发明人 INOUE MASAHIRO
分类号 H01J37/21;H01J37/28 主分类号 H01J37/21
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