METHOD OF PREPARING SILICON SPECIMEN FOR DETERMINING FLAWS OF STRUCTURE,申请号SU19904885843-传众专利搜索

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发明名称	METHOD OF PREPARING SILICON SPECIMEN FOR DETERMINING FLAWS OF STRUCTURE
摘要
申请公布号	RU1800309(C)	申请公布日期	1993.03.07
申请号	SU19904885843	申请日期	1990.11.29
申请人	NII PRIKLADNYKH FIZICHESKIKH PROBLEM IM.A.N.SEVCHENKO	发明人	ASHKINADZE SERGEJ D,SU;SOLOVEV VALERIJ S,SU;TIKAVYJ IGOR V,SU
分类号	G01N1/28;G01N1/32;H01L21/66	主分类号	G01N1/28
代理机构		代理人
主权项
地址

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