MEASURING APPARATUS OF AREA OF LIGHT-TRANSMITTING WAFER,申请号JP19910244529-传众专利搜索

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发明名称	MEASURING APPARATUS OF AREA OF LIGHT-TRANSMITTING WAFER
摘要
申请公布号	JPH0552538(A)	申请公布日期	1993.03.02
申请号	JP19910244529	申请日期	1991.08.29
申请人	SHIN ETSU HANDOTAI CO LTD	发明人	ISHII YASUHIRO;SUGIYAMA HIROYUKI
分类号	G01B11/28;H01L21/66	主分类号	G01B11/28
代理机构		代理人
主权项
地址

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