| 摘要 |
PURPOSE:To achieve higher detection accuracy by removing a difference or the like in dependence on temperature of sensitivity of piezoelectric elements. CONSTITUTION:A vibrator 5 which is made up of piezoelectric elements 11 and 12 stuck at least on two sides adjacent of a vibrator 1 rectangular in the shape of a transverse surface being separated from corners is driven alternately in the diagonal direction of the vibrator. This achieves stable and highly accurate detection results constantly. |
