METHOD FOR MICROMACHINING SEMICONDUCTOR MATERIAL,申请号EP19920303980-传众专利搜索

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发明名称	METHOD FOR MICROMACHINING SEMICONDUCTOR MATERIAL
摘要
申请公布号	EP0512771(A3)	申请公布日期	1993.02.24
申请号	EP19920303980	申请日期	1992.05.01
申请人	HONEYWELL INC.	发明人	HINES, JOHN R.;KIRKPATRICK, RICHARD;JOHNSON, RALPH H.
分类号	G01L9/00;(IPC1-7):G01L9/00	主分类号	G01L9/00
代理机构		代理人
主权项
地址

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