发明名称 |
Method for microwave plasma assisted CVD diamond coating. |
摘要 |
<p>The invention relates to a method for diamond coating of a large number of discrete components by Microwave Plasma Assisted CVD equipped with a bowl shaped substrate table. Its geometrical shape and configuration results in a more stable plasma, the shape and position of which conform well with the individual components. This reactor geometry also enhances the flow of the excited gas mixtures and therefore a large number of discrete components can be coated simultaneously even at high microwave power. <IMAGE></p> |
申请公布号 |
EP0528778(A1) |
申请公布日期 |
1993.02.24 |
申请号 |
EP19920850194 |
申请日期 |
1992.08.14 |
申请人 |
SANDVIK AKTIEBOLAG |
发明人 |
SOEDERBERG, STAFFAN;SHAHANI, HAMID;SJOESTRAND, MATS |
分类号 |
B23B27/14;B23P15/28;C23C16/26;C23C16/27;C23C16/458;C23C16/50;C23C16/511;C30B29/04;H01L21/00 |
主分类号 |
B23B27/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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