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发明名称
MAGNETRON SPUTTERING METHOD AND DEVICE
摘要
申请公布号
JPH0544029(A)
申请公布日期
1993.02.23
申请号
JP19910229604
申请日期
1991.08.16
申请人
ASAHI GLASS CO LTD
发明人
YOSHIKAWA YUKIO;NONAKA FUMIKO;NODA KAZUYOSHI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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