| 摘要 |
<p>PURPOSE:To provide a face plate foreign matter inspecting device to sense effectively the foreign matter attached to a face plate. CONSTITUTION:A face plate foreign matter inspecting device is equipped with a loading and traveling part 5 consisting of an X-Y motion mechanism 51 and loading table 52, arid this part 5 is furnished with a foreign matter sensing optical system 4 composed of a light projecting system 41 and light receiving system 42 and an optical system 10 composed of a level sensing part 7 and calibrative optical system 9. The light projecting system 41 consists of a laser beam source 412 and beam projector 411, while the light receiving system 42 consists of a condenser lens 421, foreign matter sensor 422, and cylindrical lens 423, wherein a photo-shield plate 43 is inserted closely in front of this cylindrical lens 423. The level sensing part 7 consists of a image forming lens 71 and level sensor 72 while the calibrative optical system 9 consists of a half mirror 91 and irradiation position sensor 92. With the optical system 10 are connected a vertical motion control part 6, which is composed of a position control circuit 61 and Z-motion mechanism 62, and also the level sensor 72 and the irradiation position sensor 92. To the loading table 52 is secured a calibration plate 8 with ground glass plate, which has a surface level to be used as the reference level for the face plate.</p> |
