X-RAY IMAGE SENSOR AND X-RAY INSPECTOR

摘要

PURPOSE:To obtain an X-ray image sensor which allows the removal of effect of beam hardening and an X-ray inspector which enables the measurement of a quantity of material accurately without depending on the thickness of an object to be inspected. CONSTITUTION:An object to be inspected consisting of a bone part 8 and a soft tissue 7 as quantitative intended object is arranged between an X-ray generator 5 equipped with a K edge filter 24 and an X-ray image sensor comprising a plurality of unit, detectors 1 and 2. The unit detectors 1 and 2 are pulse counting type CdTe radiation detectors and outputs of the detectors are separated into signals of stages high and low to count through a preamplifier 25, a pulse height discrimination circuit 26 and a counting circuit 27. Intensity Ih1f of high energy X rays after transmitted through the soft tissue 7 and a filter 4 and intensity Il1f of low energy X rays after transmitted through an object to be inspected are counted with the unit detector 2 simultaneously. Quantity of substance of the filter TfXrhof is calculated with a calculation processing section 28 from the Ih1f and Il1f and the like and a correction coefficient for correcting effect of a beam hardening is obtained from a ratio between the results and an actually measured value.