Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate

摘要

At least one tongue-shaped armature (2) is pivotably and flexibly connected at one end to a substrate (1). The free end of the armature carries at least one electrically conductive contact (9). The armature has at least one conductive layer (7). An opposing plate (3) carries at least one conductive layer (8) and at least one counter-contact (10) cooperative with the contact (9) of the armature. The opposing conductive layers (7,8) are insulated from each other and are provided with voltages of opposite polarity. In a first switch position, the armature forms a wedge-shaped air gap (6) with the opposing plate. In a second position, by applying a voltage, to the electrodes (7,8) of the armature and the opposing plate, a contact is closed. By appropriate configuration of the substrate and armature, both lazy contact and change-over contacts can be made. ADVANTAGE - Achieves highest possible electrostatic force and contact force with smallest possible dimensions and voltage.