| 摘要 |
PURPOSE:To make a vertical linear motor operationally available even at an invisible place in the case of accurately detecting the malfunction of the vertical linear motor. CONSTITUTION:A carrier capsule position-transducing signal from a position transducer is sent to a controller 1, a thrust command is operated in the controller, and the thrust command is sent from the controller 1 to a driver 2 according to a carrier capsule position. In a malfunction detector 6, then, the carrier capsule 4 position at the time, when a vertical linear motor 5 operates actually, is estimated by a thrust signal from the controller 1, driver mathematical model 7 and vertical linear motor mathematical model 8; the difference between the result of estimation and carrier capsule position-transducing signal is obtained by a subtracter 10; further, the result of subtraction is compared with a predetermined threshold value set beforehand in a comparator 9; and when the difference is large, the result is outputted as malfunction signal to the controller 1. |
