发明名称 Method for preparing a super conducting thin film of compound oxide.
摘要 Improvement in a method for preparing a superconducting thin film of compound oxide on a substrate (6) by laser evaporation technique. A rear surface of a target (7)used is cooled forcedly by a cooling system (9) during film formation. <IMAGE>
申请公布号 EP0526326(A2) 申请公布日期 1993.02.03
申请号 EP19920402175 申请日期 1992.07.28
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 ITOZAKI, HIDEO;NAGAISHI, TATSUOKI;NAKANISHI, HIDENORI;TANAKA, SABURO
分类号 C23C14/34;C23C14/28;C30B29/22;H01B12/06;H01B13/00;H01L21/203;H01L39/24 主分类号 C23C14/34
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