发明名称 |
PROCESS FOR PREPARING A THIN FILM OF SUPERCONDUCTING COMPOUND OXIDE |
摘要 |
A process for preparing a superconducting thin film of a compound oxide by a process which is similar to MBE technique. In the present process, a plurality of atom beams or molecular beams each contains one element selected from constituent elements of the compound oxide are directed onto a substrate in a predetermined order, so that a plurality of mono-molecular layers are deposited on the substrate. |
申请公布号 |
CA1313335(C) |
申请公布日期 |
1993.02.02 |
申请号 |
CA19880575580 |
申请日期 |
1988.08.24 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
HARADA, KEIZO;FUJIMORI, NAOJI;YAZU, SHUJI;JODAI, TETSUJI |
分类号 |
C23C14/08;C23C14/24;C30B23/02;H01L39/24 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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