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发明名称
PRODUCTION OF BORON NITRIDE FILM
摘要
申请公布号
JPH054807(A)
申请公布日期
1993.01.14
申请号
JP19910151780
申请日期
1991.06.24
申请人
SUMITOMO ELECTRIC IND LTD
发明人
TODA NAOHIRO;TOMIKAWA TADASHI;NAKAYAMA AKIRA
分类号
C01B21/064;C30B25/06;C30B29/38
主分类号
C01B21/064
代理机构
代理人
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地址
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