| 摘要 |
PURPOSE:To provide the process for production of the stamper which obviates the warpage in a polishing stage after electrocasting and can easily produce the stamper having a uniform thickness. CONSTITUTION:A photoresist layer is applied and formed on the surface of a glass substrate 11 and rugged fine patterns are formed thereon, by which a glass mater disk 13 is obtd. A conducting film 14 is then formed on the film forming surface of the glass mater disk 13. The glass mater disk 13 formed with the conducting film 14 is held by a master disk holder 18 having a projecting surface shape on the mounting surface in such a manner that the film forming surface of the glass mater disk 13 constitutes a projecting surface. The glass mater disk 13 is then energized in an electrocasting liquid to execute electrocasting on the glass mater disk 13 formed with the conducting film 14, by which a metallic film 15 is formed on the conducting film 14. Such master disk is taken out, is rested for a prescribed period of time at room temp. and is polished; thereafter, the conducting film 14 and the metallic film 15 are simultaneously peeled as an integral body from the glass mater disk 13, by which the stamper is produced. |
