| 摘要 |
PURPOSE:To provide titanium plates for magnetic disk substrates or the like of little plate thickness fluctuation by setting the thickness of carriers in such a way as to satisfy d<=0.2t where (d) is the difference between the maximum thickness one and the minimum thickness one among plural carriers and (t) is the average thickness of the carriers. CONSTITUTION:There are provided plural carriers 5 with titanium plates 6 held thereto, and polishing members 7 are interposed between surface tables 1, 2 and the titanium plates 6. In this state, relative motion is generated between the surface tables 1, 2 and the carriers 5 to polish the titanium plates 6. In this case, the thickness of the carriers 5 is set to satisfy d<=0.2t where (d) is the difference between the maximum thickness one and the minimum thickness one among plural carriers 5 and (t) is the average thickness of the carriers 5. This results in reducing the plate thickness fluctuation of the titanium plates 6. |
