| 摘要 |
PURPOSE:To substantially prevent the peeling and cracking of the multi-layered films of the element constituted by forming the multi-layered films having at least either of carbon films of hydrogenated amorphous carbon films and diamond-like carbon films on a base body. CONSTITUTION:The multi-layered films laminated with the hydrogenated amorphous carbon films (a-C:H) and dielectric films (SiO2, ZrO2, KgF2) are formed on the base body (PMMA). The one dielectric film (ZrO2, MgF2) has the tensile stress within a 1X10<3> to 1(X)10<10>dyn/cm<2> range. The hydrogenated amorphous carbon films and the other dielectric film (SiO2) have the compressive stress within a 1X10<8> to 1X10<10>dyn/cm<2> range. The average stress of the multi-layered films is set relatively low in this way. |
