FORMATION OF AL ALLOY FILM IN SEMICONDUCTOR DEVICE,申请号JP19910138920-传众专利搜索

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发明名称	FORMATION OF AL ALLOY FILM IN SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH04364036(A)	申请公布日期	1992.12.16
申请号	JP19910138920	申请日期	1991.06.11
申请人	OKI ELECTRIC IND CO LTD	发明人	HASHIMOTO KEIICHI
分类号	C23C14/34;H01L21/28;H01L21/285;H01L21/3205;H01L23/52	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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