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发明名称
ION SOURCE
摘要
申请公布号
JPH04359853(A)
申请公布日期
1992.12.14
申请号
JP19910134640
申请日期
1991.06.06
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YOSHIDA ZENICHI
分类号
H01J27/16;H01J37/08
主分类号
H01J27/16
代理机构
代理人
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