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发明名称
摘要
申请公布号
JPH0478923(B2)
申请公布日期
1992.12.14
申请号
JP19870258604
申请日期
1987.10.14
申请人
RIKAGAKU KENKYUSHO
发明人
IDESAWA MASANORI
分类号
H01L21/66;G01B11/00;G01C3/06;H01L21/68
主分类号
H01L21/66
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