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发明名称
VERTICAL STEPPER
摘要
申请公布号
KR920010727(B1)
申请公布日期
1992.12.14
申请号
KR19890013661
申请日期
1989.09.22
申请人
FUJITSU LTD.
发明人
DABADA, FUMIO;TOORU, KAMADA;YUJI, SAKADA;SEKIGUCHI, HIDENORI
分类号
B23Q1/36;B23Q1/62;B23Q5/50;B23Q11/00;G03F7/20;(IPC1-7):H01L21/30
主分类号
B23Q1/36
代理机构
代理人
主权项
地址
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