| 摘要 |
PURPOSE:To provide the laser beam machining optical system which does not exert an adverse influence caused by excessive heat or the center part and the peripheral part of the part to be irradiated, at the time of working an object to be worked by radiating collectively a laser light to a large area, and the laser beam machining method executed by this optical system. CONSTITUTION:In the laser beam machining optical system for shaping a laser light 2 from a laser oscillator to an arbitrary rectangle by a rectangular opening slit 5, reducing and projecting it onto an object 10 to be worked and executing working, an adjusting means 17 of a power density distribution in a rectangular opening projection image is constituted of a laser light reflecting plate 18 or a laser light attenuating plate 21 and its driving mechanism 19. |
