发明名称 |
Method of manufacturing a superconducting microwave component substrate. |
摘要 |
<p>A substrate for a superconducting microwave component is composed of a pair of oxide superconductor thin films (2a, 2b) formed on opposite surfaces of a dielectric substrate (1), respectively. After Tl-type oxide superconducting thin films (2a, 2b) are deposited on the opposite surfaces of the dielectric substrate (1), respectively, an annealing is performed in a thallium atmosphere. <IMAGE></p> |
申请公布号 |
EP0517560(A2) |
申请公布日期 |
1992.12.09 |
申请号 |
EP19920401374 |
申请日期 |
1992.05.20 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
MATSUURA, TAKASHI;HIGAKI, KENJIRO;ITOZAKI, HIDEO |
分类号 |
C04B41/80;C01G1/00;C04B41/87;C23C14/58;H01L39/24;H01P11/00;H05K1/09;H05K3/16 |
主分类号 |
C04B41/80 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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