发明名称 Method of manufacturing a superconducting microwave component substrate.
摘要 <p>A substrate for a superconducting microwave component is composed of a pair of oxide superconductor thin films (2a, 2b) formed on opposite surfaces of a dielectric substrate (1), respectively. After Tl-type oxide superconducting thin films (2a, 2b) are deposited on the opposite surfaces of the dielectric substrate (1), respectively, an annealing is performed in a thallium atmosphere. &lt;IMAGE&gt;</p>
申请公布号 EP0517560(A2) 申请公布日期 1992.12.09
申请号 EP19920401374 申请日期 1992.05.20
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 MATSUURA, TAKASHI;HIGAKI, KENJIRO;ITOZAKI, HIDEO
分类号 C04B41/80;C01G1/00;C04B41/87;C23C14/58;H01L39/24;H01P11/00;H05K1/09;H05K3/16 主分类号 C04B41/80
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