Miniature electrostatic pump with several spaced electrodes - has each electrode fitted to one side of electrode support body, insulated against them

摘要

The pump electrodes are arranged in a non-conductive liq. or gas to be pumped in a spaced arrangement in the pumping flow direction. They are engageable by a potential for injecting or accelarion a fluid ion current between the electrodes. The two electrodes (10,11) are secured to the main surfaces (5,6) of an electrode support body (2). The electrode support body is insulated w.r.t. the electrodes and has at least one through flow aperture (7) vertical to its main surfaces. Pref. the support body is of semiconductor material, surrounded by an axide layer (9) of the semiconductor material. The electrodes are formed by two-side metallising of the oxide layer. ADVANTAGE - Simple mfr. and increased miniature rising.