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发明名称
LIFT-OFF VERFAHREN ZUR HERSTELLUNG VON LEITERBAHNEN AUF EINEM SUBSTRAT.
摘要
申请公布号
DE3782389(D1)
申请公布日期
1992.12.03
申请号
DE19873782389
申请日期
1987.08.20
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
WATANABE, HIROSHI, MITO-SHI, JP;MIURA, OSAMU;MIYAZAKI, KUNIO;NUMATA, SHUNICHI, HITACHI-SHI, JP;OTSUKA, KANJI, HIGASHIYAMATO-SHI, JP
分类号
H01L21/3205;H01L21/027;H01L21/306;H01L21/312;H05K3/02;H05K3/04;H05K3/06;H05K3/46;(IPC1-7):H01L21/312;H01L21/00;H01L21/90
主分类号
H01L21/3205
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代理人
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