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发明名称
ATMOSPHERIC PRESSURE CVD DEVICE
摘要
申请公布号
JPH04346668(A)
申请公布日期
1992.12.02
申请号
JP19910115196
申请日期
1991.05.21
申请人
NEC YAMAGATA LTD
发明人
SHOJI KUNIHIKO
分类号
C23C16/44;C23C16/455;C23C16/52;H01L21/205;H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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