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发明名称
MICROSCOPE
摘要
申请公布号
JPH04340242(A)
申请公布日期
1992.11.26
申请号
JP19910098106
申请日期
1991.04.03
申请人
HITACHI LTD
发明人
SHIGYO YOSHIHARU;OGINO MASAYOSHI
分类号
G02B21/02;G02B21/26;H01L21/66
主分类号
G02B21/02
代理机构
代理人
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地址
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