| 摘要 |
PURPOSE:To prevent the deformation of a heater by providing a heating layer made of conducting ceramic on both faces of a support substrate made of electrical insulating ceramic. CONSTITUTION:A conducting ceramic layer of the same type as the conducting ceramic serving as a heating layer existing on the surface is provided on the rear side of a multi-layer ceramic support substrate constituted of an electrical insulating ceramic support substrate and the conducting ceramic provided on the surface. When it is heated, thermal stress is generated between the support substrate and the conducting ceramic provided on the rear face, and the magnitude of this thermal stress is equal to and balanced with the magnitude of the thermal stress generated between the support substrate and the heating layer. The deformation of a heater can be prevented. When it is used for the heat treatment of a wafer, the temperature homogeneity of the wafer can be improved. |
